%0 Journal Article
%A K. A. Valiev
%A H. Zeyfarth
%A D. R. Ilkayev
%A T. M. Makhviladze
%T Modellinc and optimization of the optical schemes of the photolithography systems
%J Matematičeskoe modelirovanie
%D 1990
%P 56-75
%V 2
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1990_2_1_a5/
%G ru
%F MM_1990_2_1_a5