@article{MM_1990_2_1_a5,
     author = {K. A. Valiev and H. Zeyfarth and D. R. Ilkayev and T. M. Makhviladze},
     title = {Modellinc and optimization of the optical schemes of the photolithography systems},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {56--75},
     publisher = {mathdoc},
     volume = {2},
     number = {1},
     year = {1990},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1990_2_1_a5/}
}