%0 Journal Article
%A A. F. Burenkov
%A A. I. Kirkovski
%A V. A. Tsurko
%T Numerical simulation submicron doped regions in semiconductor structures manufacturing
%J Matematičeskoe modelirovanie
%D 1990
%P 13-25
%V 2
%N 10
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1990_2_10_a1/
%G ru
%F MM_1990_2_10_a1