@article{MM_1990_2_10_a1,
     author = {A. F. Burenkov and A. I. Kirkovski and V. A. Tsurko},
     title = {Numerical simulation submicron doped regions in semiconductor structures manufacturing},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {13--25},
     publisher = {mathdoc},
     volume = {2},
     number = {10},
     year = {1990},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1990_2_10_a1/}
}