%0 Journal Article
%A A. L. Bogdanov
%A K. A. Valiev
%A L. V. Velikov
%A D. Yu. Zaroslov
%A V. A. Nikitaev
%A V. E. Tukish
%T A~method of data processing for the interferometric control of dissolution of resist film
%J Matematičeskoe modelirovanie
%D 1989
%P 160-164
%V 1
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/
%G ru
%F MM_1989_1_2_a9