@article{MM_1989_1_2_a9,
     author = {A. L. Bogdanov and K. A. Valiev and L. V. Velikov and D. Yu. Zaroslov and V. A. Nikitaev and V. E. Tukish},
     title = {A~method of data processing for the interferometric control of dissolution of resist film},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {160--164},
     publisher = {mathdoc},
     volume = {1},
     number = {2},
     year = {1989},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1989_1_2_a9/}
}