%0 Journal Article %A M. V. Bochkov %A T. M. Makhviladze %A S. B. Pekarchuk %A B. N. Chetverushkin %T Numerical modelling of etching of polymers in an oxygen-containing atmosphere %J Matematičeskoe modelirovanie %D 1989 %P 1-13 %V 1 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/MM_1989_1_2_a0/ %G ru %F MM_1989_1_2_a0