@article{MM_1989_1_11_a5, author = {K. A. Volosov and V. G. Danilov}, title = {A~model of thermal silicon oxidation}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {58--67}, publisher = {mathdoc}, volume = {1}, number = {11}, year = {1989}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1989_1_11_a5/} }