%0 Journal Article
%A М.Г. Опаец
%A В.П. Деркач
%A В.Г. Сучеван
%T The solution of an axially symmetric boundary value problem of the generalized heat equation and its application in the technology of microschemes
%J Matematičeskie issledovaniâ
%D 1982
%P 90-95
%V 70
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MI_1982__70_189705/
%G en
%F MI_1982__70_189705