%0 Journal Article
%A Alexander V. Efremov
%A Sergey G. Ovchinnikov
%A Sergey N. Varnakov
%A Nikolay N. Kosyrev
%T Ellipsometer Mounting System Design Using CAD
%J Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika
%D 2010
%P 118-124
%V 3
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/
%G ru
%F JSFU_2010_3_1_a11