@article{JSFU_2010_3_1_a11,
     author = {Alexander V. Efremov and Sergey G. Ovchinnikov and Sergey N. Varnakov and Nikolay N. Kosyrev},
     title = {Ellipsometer {Mounting} {System} {Design} {Using} {CAD}},
     journal = {\v{Z}urnal Sibirskogo federalʹnogo universiteta. Matematika i fizika},
     pages = {118--124},
     publisher = {mathdoc},
     volume = {3},
     number = {1},
     year = {2010},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/}
}