TY  - JOUR
AU  - Yu. A. Eremin
AU  - V. I. Ivakhnenko
TI  - Analysis of inhomogeneities on wafers by the integral transform method
JO  - Differencialʹnye uravneniâ
PY  - 2000
SP  - 1238
EP  - 1247
VL  - 36
IS  - 9
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/
LA  - ru
ID  - DE_2000_36_9_a8
ER  -