%0 Journal Article
%A Yu. A. Eremin
%A V. I. Ivakhnenko
%T Analysis of inhomogeneities on wafers by the integral transform method
%J Differencialʹnye uravneniâ
%D 2000
%P 1238-1247
%V 36
%N 9
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/
%G ru
%F DE_2000_36_9_a8