@article{DE_2000_36_9_a8, author = {Yu. A. Eremin and V. I. Ivakhnenko}, title = {Analysis of inhomogeneities on wafers by the integral transform method}, journal = {Differencialʹnye uravneni\^a}, pages = {1238--1247}, publisher = {mathdoc}, volume = {36}, number = {9}, year = {2000}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/} }