TY  - JOUR
AU  - A. V. Vinogradov
AU  - N. N. Zorev
TI  - On the possibility of X-ray projection lithography realization
JO  - Doklady Akademii Nauk
PY  - 1988
SP  - 82
EP  - 85
VL  - 302
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/
LA  - ru
ID  - DAN_1988_302_1_a19
ER  -