%0 Journal Article
%A A. V. Vinogradov
%A N. N. Zorev
%T On the possibility of X-ray projection lithography realization
%J Doklady Akademii Nauk
%D 1988
%P 82-85
%V 302
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/
%G ru
%F DAN_1988_302_1_a19