@article{DAN_1988_302_1_a19, author = {A. V. Vinogradov and N. N. Zorev}, title = {On the possibility of {X-ray} projection lithography realization}, journal = {Doklady Akademii Nauk}, pages = {82--85}, publisher = {mathdoc}, volume = {302}, number = {1}, year = {1988}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/} }