@article{DAN_1987_294_6_a16, author = {V. P. Ageev and I. V. Baranenkov and K. A. Valiev and L. V. Velikov and V. I. Konov and A. I. Maslakov and V. M. Melnikov and A. M. Prokhorov}, title = {Application of metal resinate films in electron- and photolithography}, journal = {Doklady Akademii Nauk}, pages = {1358--1362}, publisher = {mathdoc}, volume = {294}, number = {6}, year = {1987}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1987_294_6_a16/} }