@article{DAN_1981_257_5_a21, author = {M. F. Galyautdinov and Yu. K. Danileiko and M. M. Zaripov and A. A. Manenkov and A. V. Sidorin and I. B. Khaibullin and E. I. Shtyrkov}, title = {Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation}, journal = {Doklady Akademii Nauk}, pages = {1110--1113}, publisher = {mathdoc}, volume = {257}, number = {5}, year = {1981}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1981_257_5_a21/} }