TY  - JOUR
AU  - P. V. Pavlov
TI  - Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen
JO  - Doklady Akademii Nauk
PY  - 1978
SP  - 1108
EP  - 1110
VL  - 240
IS  - 5
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/
LA  - ru
ID  - DAN_1978_240_5_a21
ER  -