%0 Journal Article
%A P. V. Pavlov
%T Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen
%J Doklady Akademii Nauk
%D 1978
%P 1108-1110
%V 240
%N 5
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/
%G ru
%F DAN_1978_240_5_a21