@article{DAN_1978_240_5_a21,
     author = {P. V. Pavlov},
     title = {Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen},
     journal = {Doklady Akademii Nauk},
     pages = {1108--1110},
     publisher = {mathdoc},
     volume = {240},
     number = {5},
     year = {1978},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/}
}