TY  - JOUR
AU  - V. P. Zakharov
AU  - I. M. Protas
TI  - Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase
JO  - Doklady Akademii Nauk
PY  - 1974
SP  - 562
EP  - 564
VL  - 215
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/
LA  - ru
ID  - DAN_1974_215_3_a16
ER  -