%0 Journal Article
%A V. P. Zakharov
%A I. M. Protas
%T Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase
%J Doklady Akademii Nauk
%D 1974
%P 562-564
%V 215
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/
%G ru
%F DAN_1974_215_3_a16