@article{DAN_1974_215_3_a16, author = {V. P. Zakharov and I. M. Protas}, title = {Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase}, journal = {Doklady Akademii Nauk}, pages = {562--564}, publisher = {mathdoc}, volume = {215}, number = {3}, year = {1974}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1974_215_3_a16/} }