TY - JOUR AU - V. V. Yudin TI - On the theory of atomic displacement during ion implantation JO - Doklady Akademii Nauk PY - 1973 SP - 74 EP - 76 VL - 213 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/DAN_1973_213_1_a18/ LA - ru ID - DAN_1973_213_1_a18 ER -