TY  - JOUR
AU  - V. M. Gusev
AU  - N. P. Busharov
AU  - K. D. Demakov
AU  - Yu. G. Kozlov
TI  - The effect of channelling on the distribution of electrically active boron and phosphorus atoms intruded into silicon single crystals
JO  - Doklady Akademii Nauk
PY  - 1971
SP  - 319
EP  - 322
VL  - 197
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1971_197_2_a19/
LA  - ru
ID  - DAN_1971_197_2_a19
ER  -