@article{DAN_1971_197_2_a19,
     author = {V. M. Gusev and N. P. Busharov and K. D. Demakov and Yu. G. Kozlov},
     title = {The effect of channelling on the distribution of electrically active boron and phosphorus atoms intruded into silicon single crystals},
     journal = {Doklady Akademii Nauk},
     pages = {319--322},
     publisher = {mathdoc},
     volume = {197},
     number = {2},
     year = {1971},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1971_197_2_a19/}
}