TY  - JOUR
AU  - O. B. Firsov
TI  - Target sputtering as dependent on the incidence angle of the bombarding particles
JO  - Doklady Akademii Nauk
PY  - 1969
SP  - 302
EP  - 304
VL  - 189
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/
LA  - ru
ID  - DAN_1969_189_2_a21
ER  -