%0 Journal Article %A O. B. Firsov %T Target sputtering as dependent on the incidence angle of the bombarding particles %J Doklady Akademii Nauk %D 1969 %P 302-304 %V 189 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/ %G ru %F DAN_1969_189_2_a21