@article{DAN_1969_189_2_a21, author = {O. B. Firsov}, title = {Target sputtering as dependent on the incidence angle of the bombarding particles}, journal = {Doklady Akademii Nauk}, pages = {302--304}, publisher = {mathdoc}, volume = {189}, number = {2}, year = {1969}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/DAN_1969_189_2_a21/} }