TY  - JOUR
AU  - P. V. Pavlov
AU  - È. V. Shitova
TI  - The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions
JO  - Doklady Akademii Nauk
PY  - 1967
SP  - 588
EP  - 590
VL  - 172
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/
LA  - ru
ID  - DAN_1967_172_3_a19
ER  -