%0 Journal Article
%A P. V. Pavlov
%A È. V. Shitova
%T The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions
%J Doklady Akademii Nauk
%D 1967
%P 588-590
%V 172
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/
%G ru
%F DAN_1967_172_3_a19