@article{DAN_1967_172_3_a19,
     author = {P. V. Pavlov and \`E. V. Shitova},
     title = {The structure of the oxide films obtained by bombarding the surface of silicon with oxygen ions},
     journal = {Doklady Akademii Nauk},
     pages = {588--590},
     publisher = {mathdoc},
     volume = {172},
     number = {3},
     year = {1967},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1967_172_3_a19/}
}