TY  - JOUR
AU  - V. Belko
AU  - S. V. Lemeshevskii
AU  - M. M. Chuiko
TI  - Numerical modeling of high-energy ion implantation using Fokker – Planck equations
JO  - Journal of the Belarusian State University. Mathematics and Informatics
PY  - 2017
SP  - 28
EP  - 36
VL  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/BGUMI_2017_2_a4/
LA  - ru
ID  - BGUMI_2017_2_a4
ER  -