%0 Journal Article
%A Krátká, N.
%A Neykova, N.
%A Kromka, A
%A Rezek, B.
%T Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors
%J Acta Universitatis Carolinae. Mathematica et Physica
%D 2012
%P 97-103
%V 53
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/AUCMP_2012__53_2_a10/
%G en
%F AUCMP_2012__53_2_a10