TY - JOUR AU - Philippe Laurençot AU - Christoph Walker TI - On a three-dimensional free boundary problem modeling electrostatic MEMS JO - Interfaces and free boundaries PY - 2016 SP - 393 EP - 411 VL - 18 IS - 3 UR - http://geodesic.mathdoc.fr/articles/10.4171/ifb/368/ DO - 10.4171/ifb/368 ID - 10_4171_ifb_368 ER -