%0 Journal Article %A Philippe Laurençot %A Christoph Walker %T On a three-dimensional free boundary problem modeling electrostatic MEMS %J Interfaces and free boundaries %D 2016 %P 393-411 %V 18 %N 3 %U http://geodesic.mathdoc.fr/articles/10.4171/ifb/368/ %R 10.4171/ifb/368 %F 10_4171_ifb_368